Optical properties of scandium films in the far and the extreme ultraviolet
Juan I. Larruquert, José A. Aznárez, José A. Méndez, Andrea Marco Malvezzi, Luca Poletto, and Sara Covini
Layer-by-layer design method for multilayers with barrier layers application to SiMo multilayers for extreme-ultraviolet lithography
Juan I. Larruquert