Deposition chambers UHV-connected to the FUV-EUV reflectometer

The FUV-EUV reflectometer is connected in vacuum to a thermal evaporation chamber and, in turn, to a sputtering chamber. This enables samples to be measured in situ, i.e., before they are exposed to the atmosphere.

  • Chambers in an ISO-8 clean room.
  • Thermal evaporation chamber pumped with an ion pump and a Ti sublimation pump, with a 3-source thermal evaporation system.
  • Cryo-pumped ion beam sputtering chamber with a four-target holder.
  • In-situ measurements available.