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Equipment
ISO-6 Clean-room deposition system
FUV-EUV reflectometer in an iso-8 clean room
Deposition chambers UHV-connected to the FUV-EUV reflectometer
Other HV chambers
NUV-NIR ellipsometer
Profilometer
Coatings
Narrowband mirrors
Reflective band at the shortest far UV wavelength: 100 nm
Narrowband coatings in the ~120-200 nm spectral range with selection of peak wavelength and bandwidth
Narrowband coatings in the long extreme UV
Broadband mirrors
Al/MgF
2
Al/AlF
3
Broadband EUV mirrors
Transmittance filters
Polarizers
Coating design
Optical constants of materials
Lanthanides
Alkaline-earths
Carbon and neighbours
Fluorides
Oxides
Materials were measured in parts of the far and extreme UV with non self-consistent methods
Evaluation of optical constant consistency
Modified optical-constant models
New properties of optical constants
Local deconvolution
Analysis of Adachi procedure
New coating design: multi-material multilayers
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