The FUV-EUV reflectometer is connected in vacuum to a thermal evaporation chamber and, in turn, to a sputtering chamber. This enables samples to be measured in situ, i.e., before they are exposed to the atmosphere.
- Chambers in an ISO-8 clean room.
- Thermal evaporation chamber pumped with an ion pump and a Ti sublimation pump, with a 3-source thermal evaporation system.
- Cryo-pumped ion beam sputtering chamber with a four-target holder.
- In-situ measurements available.