GOLD developed a reflectometer with the main following features:
- Main spectral range: 40-200 nm.
- Light consists in spectral lines from discharge lamps, including windowless, gas flowing lamps.
- In an ISO-8 clean room.
- Main chamber in UHV.
- Reflectometer connected in vacuum to evaporation and to sputtering chamber for in situ measurements.
- TGM1200 monochromator from Horiba Jobin Ivon. It consists in a grazing-incidence, toroidal-grating monochromator, in which the entrance and exit arms are 146° apart. The monochromator covers the 12.5–200-nm spectral range with two Pt-coated diffraction gratings.
Reflectometer and evaporation system, general view
Additional metrology equipment
In addition to the FUV-EUV reflectometer, near UV to near IR spectrophotometers are available at Institute of Optics. They consist in Perkin-Elmer Lambda 900 and Lambda 9 spectrophotometers covering reflectance and transmittance measurements in the 190-2500 nm range.
The reflectometer. From left to right: lamp, monochromator, polarizer, main chamber
The main reflectometer chamber and the connected deposition chambers