por LARRUQUERT | Abr 29, 2002 | articles-2002
Juan I. Larruquert and Ritva A. M. Keski-Kuha Abstract Multilayer coatings with a small number of layers were designed and prepared to provide an increase in normal-incidence reflectance in the extreme ultraviolet compared with the reflectance of available...
por LARRUQUERT | Abr 29, 2002 | articles-2002, Coatings Design - New coating design
Juan I. Larruquert Abstract Sub-quarterwave multilayer coatings with more than two different materials are shown to provide a reflectance enhancement compared with the standard two-material multilayer coatings when reflectance is limited by material absorption. A...
por LARRUQUERT | Abr 29, 2002 | articles-2002, Coatings Design - New coating design, Sin categoría
Juan I.Larruquert Abstract The new technique of sub-quarterwave multilayers is applied to design multilayers with more than two materials, with enhanced reflectance at 13.4 and 11.3 nm, the wavelengths of interest for the extreme ultraviolet lithography. We provide...
por LARRUQUERT | Abr 29, 2002 | articles-2002, OpticalConstans-non self-consistent methods
Juan I. Larruquert; Jose Antonio Mendez; Jose Antonio Aznarez Abstract Bilayers of a thin, nonoxidized Al film over an Ir film are prepared. The bilayers are intended to enhance the reflectance of Al below the Al plasma wavelength (λ p~83 nm). Above λp the bilayers...
por LARRUQUERT | Abr 29, 2002 | articles-2002, Coatings Design - New coating design, Sin categoría
Juan I. Larruquert Abstract A new layer-by-layer multilayer design method is presented. The method is demonstrated mathematically and makes possible the optimization of the multilayer for the highest possible reflectance either at normal incidence or at nonnormal...
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