Reflectance measurements and optical constants in the Extreme Ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb, and evaporated Cr

Juan I. Larruquert and Ritva A. M. Keski-Kuha Abstract Reflectance measurements and optical constants of thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb and of evaporated Cr have been measured in the extreme-ultraviolet (EUV) spectral region from 49.0 to...