por LARRUQUERT | Abr 29, 2004 | articles-2004, Coatings Design - New coating design, Sin categoría
Juan I. Larruquert Abstract A previous layer-by-layer multilayer design method [J. Opt. Soc. Am. A 19, 385 (2002)] is completed by adding the possibility of alternating layers with fixed thicknesses along with layers whose thicknesses are optimized for the largest...
por LARRUQUERT | Abr 29, 2002 | articles-2002, Coatings Design - New coating design
Juan I. Larruquert Abstract Sub-quarterwave multilayer coatings with more than two different materials are shown to provide a reflectance enhancement compared with the standard two-material multilayer coatings when reflectance is limited by material absorption. A...
por LARRUQUERT | Abr 29, 2002 | articles-2002, Coatings Design - New coating design, Sin categoría
Juan I.Larruquert Abstract The new technique of sub-quarterwave multilayers is applied to design multilayers with more than two materials, with enhanced reflectance at 13.4 and 11.3 nm, the wavelengths of interest for the extreme ultraviolet lithography. We provide...
por LARRUQUERT | Abr 29, 2002 | articles-2002, Coatings Design - New coating design, Sin categoría
Juan I. Larruquert Abstract A new layer-by-layer multilayer design method is presented. The method is demonstrated mathematically and makes possible the optimization of the multilayer for the highest possible reflectance either at normal incidence or at nonnormal...
por LARRUQUERT | Abr 29, 2001 | articles-2001, Coatings Design - New coating design
Juan I. Larruquert Abstract A new theory of multilayers with enhanced normal reflectance has been developed based on the superposition of a few layers of various different radiation-absorbing materials. Every layer in the multilayer had a sub-quarterwave optical...
por LARRUQUERT | Abr 29, 2001 | articles-2001, Coatings Design - New coating design
Juan I. Larruquert Abstract A general theory of multilayers with enhanced reflectance has been developed based on the superposition of sub-quarterwave layers of various highly radiation-absorbing materials. The theory has been developed by second-order expansion of...
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